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ALD/CVD前驱前驱体-金谷气体前驱体材料

产品摘要

金谷气体前驱体材料

详细介绍

序号	中文名	英文名称	化学式	CAS号	别名	纯度（%）
1	三甲基铝	Trimethyl Aluminum	C3H9Al	75-24-1	TMA	99.9999
2	三乙基铝	Triethyl Aluminum	(C2H5)Al	97-93-8	TEA	99.9999
3	二乙基锌	Diethylzinc	Zn(C2H5)2	557-20-0	DEZ	99.9999
4	二甲基锌	Dimethylzinc	C2H6Zn	544-97-8	DMZ	99.9999
5	三甲基镓	Trimethylgallium	Ga(CH3)3	1445-79-0	TMG	99.9999
6	三乙基镓	Triethylgallium	Ga(C2H5)3	1115-99-7	TEG	99.9999
7	三甲基铟	Trimethylindium	C3H9In	3385-78-2	TMI	99.9999
8	三甲基铋	Trimethylbismuth	(CH3)3Bi	593-91-9	TMBi	99.9999
9	三甲基锑	Trimethyl antimony	Sb(CH3)3	594-10-5	TMSb	99.9999
10	三乙基锑	Antimony triethy	C6H15Sb	617-85-6	TESb	99.9999
11	二乙基鈹	Diethylberyleium	Be(C2H5)2		DEB	99.9999
12	二叔丁基碲	Di-t-butyltelluride	PhTeMgBr	83817-35-0	DTBT	99.9999
13	二乙基碲	Diethvl tellurium	Te(C2H5)2	627-54-3	DETe	99.9999
14	二异丙基碲	Diisopropyltellurium	C6H14Te	51112-72-2	DipTe	99.99
15	三（二甲氨基）镓	Tris(dimethylamido)gallium(III)	Ga(N(CH3)2)3	57731-40-5	TDMAG	99.99
16	三（二甲胺）锑	Tris(dimethylamido)antimony(III)	C6H18N3Sb	7289-92-1	TDMASb	99.9999
17	四（二甲胺）铪	Tetrakis(diethylamion)hafnium	C8H24HfN4	19962-11-9	TDMAH	99.9999
18	四（甲乙胺）铪	Ethanamine, N-methyl-,hafnium(4+) salt (4:1)	C12H32HfN4	352535-01-4	TEMAH	99.9999
19	四（二甲胺）锗	N-methyl-N-[tris(dimethylamino)germyl]methanamine	C8H24GaN4	7344-40-3	TDMAGe	99.9999
20	四（二甲胺）锆	Tetrakis(dimethylamino)zirconium	C8H24N4Zr	19756-04-8	TDMAZ	99.9999
21	四（甲乙胺）锆	Tetrakis(ethylmethylamino)zirconium	C12H32N4Zr	175923-04-3	TEMAZ	99.9999
22	四（二甲胺）锡	N-methyl-N-[tris(dimethylamino)stannyl]methanamine	C8H24N4Sn	1066-77-9	TDMASn	99.9999
23	四氯化锡	Tin(IV) chloride	Cl4Sn	7646-78-8	SnCl4	99.9999
24	四（二甲胺）钛	Tetrakis(dimethylamino)titanium	C8H24N4Ti	3275-24-9	TDMAT	99.9999
25	四（甲乙胺）钛	Ethyl(methyl)azanide,titanium(4+)	C12H32N4Ti	308103-54-0	TEMAT	99.9999
26	四（甲乙胺）钒	Tetrakis(ethylmethylamino)vanadium	C12H32N4V	791114-66-4	TEMAV	99.99
27	五（乙氧基）钽 -乙氧基钽	Tantalum(5+) ethanolate	C10H30O5Ta	6074-84-6	PETOTa	99.999
28	五（二甲胺）钽	Pentakis(dimethylamino)tantalum(V)	C10H30N5Ta	19824-59-0	PDMATa	99.999
29	三(乙基甲酰胺基)(叔丁基酰亚氨)钽(V)	Tris(ethylmethylamido)(tert-butylimido)tantalum(V)	C13H33N4Ta	511292-99-2	TBTEMTa	99.999
30	二茂铁	Ferrocene	C10H10Fe	102-54-5	FeCp2	99.999
31	二茂镁	Magnesocene	C10H10Mg	1284-72-6	MgCp2	99.9999
32	二茂锰	Manganocene	C10H10Mn	73138-26-8	MnCp2	99.999
33	二茂镍	Nickelocene	C10H10Ni	1271-28-9	NiCp2	99.999
34	二茂钌	Ruthenocene	C10H10Ru	1287-13-4	RuCp2	99.99
35	二茂钴	Cobaltocene	(η5-C5H5)2Co	1277-43-6	CoCp2	99.999
36	二甲基二茂镁	bis(methylcyclopentadienyl)magnesium	C12H14Mg	40672-08-0	Mg(MeCp)2	99.9995
37	二乙基二茂镁	Bis(ethylcyclopentadienyl)magnesium	C14H18Mg	114460-02-5	Mg(EtCp)2
38	二乙基二茂锰	1,1'-Diethylmanganocene	C14H18Mn	101923-26-6	Mn(EtCp)2	99.999
39	二乙基二茂钌	Bis(ethylcyclopentadienyl)ruthenium	C7H9RuC7H9	32992-96-4	Ru(EtCp)2	99.999
40	（四甲基庚二酮）锂	Lithium Dipivaloylmethanate	C11H19LiO2	22441-13-0
41	（四甲基庚二酮）银	(2,2,6,6-Tetramethyl-3,5-heptanedionato)silver	C11H19AgO2	79827-25-1
42	二（六氟戊二酮）铜	Copper(II) hexafluoroacetylacetonate hydrate	Cu(C5HF6O2)2	155640-85-0	Cu(hfac)2	99.999
43	二（六氟乙酰丙酮）钯	Palladium(II)hexafluoro-2,4-pentanedionate	C10H8F18O4Pd	64916-48-9	Pd(hfac)2	99.99
44	三（乙酰丙酮）铱	Iridium(III)2,4-pentanedionate	C15H21IrO6	15635-87-7	Ir(acac)3	99.99
45	三（四甲基庚二酮）钕	Neodymium-thd	C33H60NdO6	15492-47-4	Nd(thd)3	99.999
46	三（四甲基庚二酮）镱	Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III)	C33H57O6Yb	15492-52-1	Yb(thd)3	99.999
47	四（四甲基庚二酮）铈	Tetrakis(tetramethylheptanedionato)cerium	C22H38CeO4	18960-54-8	Ce(thd)4	99.999
48	三（四甲基庚二酮）镧	Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)	C33H57LaO6	14319-13-2	La（thd）3	99.999
49	甲基环戊二烯镧	Tris(tetramethylcyclopentadienyl)lanthanum	C27H39La	148607-23-2	La(MeCp)3	99.995
50	三(二(三甲硅)胺)镧	Bis(trimethylsilyl)azanide,lanthanum(3+)	C18H54LaN3Si6	175923-07-6	La(TMSA)3	99.99
51	二（四甲基庚二酮）铅	Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionate	C22H38O4Pb	21319-43-7	Pb(thd)2	99.999
52	二（四甲基庚二酮）铯	Cesium (II)-2,2,6,6-tetramethyl-3,5-heptanedionate	C11H19O2Cs	61346-75-6	Csthd	99.999
53	三（四甲基庚二酮）铋	Bismuth III Tetramethylheptanedionate	C33H57BiO6	142617-53-6	Bi(thd)3
54	三（四甲基庚二酮）铒	Erbium-DPM	C33H57ErO6	34750-80-6	Er(thd)3	99.999
55	三（四甲基庚二酮）钇	Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)	C33H57O6Y	15632-39-0	Y(thd)3	99.999
56	三(二(三甲硅)胺)钆	Bis(trimethylsilyl)azanide,gadolinium(3+)	C18H54GdN3Si6	35789-03-8	Gd(TMSA)3	99.999
57	二（N,N’-二异丙基乙脒基）钴	Bis(N,N'-di-i-propylacetamidinato)cobalt(II)	(C8H17N2)2Co	635680-58-9	Co(iPr-MeAMD)2	99.99
58	二（N,N’-二异丙基乙脒基）镍	Bis(N,N'-diisopropylacetamidinato) Nickel (II)	C16H34N4Ni	635680-62-5	Ni(iPr-MeAMD)2	99.99
59	三（N,N’-二异丙基乙脒基）镧	Tris(N,N’-Di-tert-butylacetamidinato)lanthanum(III)	(C8H17N2)3La		La(iPr-MeAMD)3	99.99
60	三（N,N’-二异丙基乙脒基）钇	Tris(N,N’-Di-tert-butylacetamidinato)Yttrium(III)	(C8H17N2)3Y		Y(iPr-MeAMD)3	99.99
61	六羰基钼	Molybdenum hexacarbonyl	Mo(CO)6	13939-06-5	Mo(CO)6	99.99
62	二(乙酰丙酮)铂(II)	Platinum bis(acetylacetonate)	C10H14O4Pt	15170-57-7		99.999
63	三甲基甲基环戊二烯铂	(Trimethyl)methylcyclopentadienylplatinum (IV)	C9H16Pt	94442-22-5	Me3Pt(MeCp)	99.99
64	甲基环戊二烯钇	Tris(methylcyclopentadienyl)yttrium(III)	C18H21Y	329735-72-0	Y(MeCp)3	99.995
65	环戊二烯基铟	Indium,(h5-2,4-cyclopentadien-1-yl)-	C5H5In	34822-89-4	InCp	99.9999
66	四异丙醇钛	Titanium(IV) isopropoxide	C12H28O4Ti	546-68-9	TIPT	99.9999
67	五（二甲胺基）铌	Pentakis(dimethylamino)Niohium(V)	PDMANb			99.999
68	五（甲氧基）铌	Niohium pentamethnxidc	Nb(OCH3)5			99.999
69	五（乙氧基）铌	Niohium pentaethnxidc	Nb(OC2H5)5	3236-82-6	PETONb	99.999
70	叔丁醇锂	Lithium t-butoxide	C4H9LiO	1907-33-1	TBOLi	99.99
71	叔丁醇铁	Iron t-butoxide	C12H27FeO3	620945-29-1	3TBOFe	99.99
72	三异丙氧基镓	GALLIUM (III) ISOPROPOXIDE	C9H21GaO3	4452-61-3	TPGa	99.999
73	四氯化钛	Titanium tetrachloride	TiCl4	7550-45-0	TiCl4	99.9999
74	四氯化碳	Carbon tetrachloride	CCl4	56-23-5	CCl4	99.9999
75	四溴化碳	Carbon tetrabromide	CBr4	558-13-4	CBr4	99.9999
76	五氯吡啶	Pentachloropyridine	C5Cl5N	2176-62-7	PCP	99.99
77	硼化合物	boride	B		AMY-B-330	99.999
78	甲氧基锗	Germanium(Ⅳ) methoxide	C4H12GeO4	992-91-6		99.99
79	六羰基钨	hexacarbonyl tungsten	W（CO)6	14040-11-0	W(CO)6	99.9995%
80	叔丁基膦	Tert-Butyiphosphine	C4H11P	2501-94-2	TBP	99.9990%
81	叔丁基砷	Tert-Butylarsine	C4H11As	7310-29-90	TBAs	99.9990%
82	硼酸三甲酯	Trimethyl borate	C3H9BO3	121-43-7	TMB(O)	99.9999%
83	硼酸三乙酯	Triethyl borate	C6H15BO3	150-46-9	TEB(O)	99.9999%
84	磷酸三甲酯	Trimethyl phosphate	C3H9O4P	512-56-1	TMPO	99.9999%
85	亚磷酸三甲酯	trimethyl phosphite	C3H9O3P	121-45-9	TMPi	99.9999%
86	磷酸三乙酯	Triethyl phosphate	C6H15O4P	78-40-0	TEPO	99.9999%
87	亚磷酸三乙酯	Triethyl phosphite	C6H15O3P	122-52-1	TEPi	99.9999%
88	硼酸三异丙酯	Triisopropyl borate	C9H21O3B	5419-55-6		99.9999%
89	双（四甲基庚二酮）钆			14768-15-1	Gd(thd)3	99.9990%
90	三（双（三甲基甲硅烷）胺钆			35789-03-8	Gd(SiMe3)2}3	99.9990%
91	三（甲基环戊二烯）钆				Gd(MeCp)3	99.9990%
92	三乙基膦(6,6,7,7,8,8,8-七氟-2,2-二甲基-3,5-辛烷二酮)银(I)			165461-74-5	Ag(fod)(PEt3)	99.99%


1	双(叔丁基氨基)硅烷	Bis(t-butylamino)silane	([NH(C4H9)]2SiH2)	186598-40-3	BTBAS	99.9999
2	三（二甲氨基）硅烷	Tris(dimethylamino)silane	C6H19N3Si	15112-89-7	3DMAS	99.9999
3	(N,N-二硅烷基-硅烷胺)	N,N-Disilylsilanamine	H9NSi3	13862-16-3	TSA	99.999
4	双（二乙胺基）硅烷	Bis(diethylamino)silane	C8H22N2Si	27804-64-4	BDEAS(SAM24)	99.9999
5	二（异丙氨基）硅烷	Diisopropylaminosilane	C6H17NSi	908831-34-5	DIPAS(LTO-520)	99.9999
6	原硅酸乙酯	Tetraethyl Orthosilicate	C8H22N2Si	78-10-4	TEOS	99.9999999
7	六氯乙硅烷	Hexachlorodisilane	Si2Cl6	13465-77-5	HCDS	99.9999
8	四（二甲氨基）硅



1	1,1,3,3-四甲基二硅氮烷	Bisdimethylsilylamine	C4H15NSi2	15933-59-2		99.9999
2	乙二胺	Ethylenediamine	C2H8N2	107-15-3		99.999
3	一叔丁胺	tert-Butylamine	(CH3)3CNH2	75-64-9		99.999
4	偏二甲肼	unsym-Dimethylhydrazine	C2H8N2	57-14-7		99.999


1	二（三氯甲硅基）碳烷	Methylenebis(trichlorosilane)	CH2Cl6Si2	4142-85-2		99.999
2	四氯化碳	carbon tetrachloride	CCl₄	56-23-5		99.9999
3	四溴化碳	Carbon tetrabromide	CBr4	558-13-4		99.9999
4	1，2-二氯乙烯（反式）	Trans-1,2-Dichloroethylene	C2H2Cl2	156-60-5		99.9999
5	1-己烯	1-Hexene	C6H12	592-41-6		99.9999

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