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前驱体材料

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前驱体材料

详细介绍

      前驱体材料 Precursor material
金属有机类
英文名化学式CAS号别名中文名
Trimethyl AluminumC3H9Al75-24-1TMA三甲基铝
DiethylzincZn(C2H5)2557-20-0DEZ二乙基锌
DimethylzincZn(CH3)3544-97-8DMZ二甲基锌
TrimethylgalliumGa(CH3)31445-79-0TMG三甲基镓
TriethylgalliumGa(C2H5)31115-99-7TEG三乙基镓
TrimethylindiumC3H9In3385-78-2TMI三甲基铟
Trimethylbismuth(CH3)3Bi593-91-9TMB三甲基铋
Trimethyl antimonySb(CH3)3594-10-5TMSb三甲基锑
Antimony triethySb(C2H5)3617-85-6TESb三乙基锑
DiethylberylliumBe(C2H5)2542-63-2DEB二乙基鈹
Di-t-butyltelluridePhTeMgBr83817-35-0DTBT二叔丁基碲
Diethvl telluriumTe(C2H5)2627-54-3TETe二乙基碲
DiisopropyltelluriumC6H14Te51112-72-2DipTe二异丙基碲
Tris(dimethylamido)gallium(III)Ga(N(CH3)2)357731-40-5TDMAG三(二甲氨基)镓
Tris(dimethylamido)antimony(III)C6H18N3Sb7289-92-1TDMASb三(二甲胺)锑
Tetrakis(diethylamion)hafniumC8H24HfN419962-11-9TDMAH四(二甲胺)铪
Ethanamine, N-methyl-,hafnium(4+) salt (4:1)C12H32HfN4352535-01-4TEMAH四(甲乙胺)铪
N-methyl-N-[tris(dimethylamino)germyl]methanamineC8H24GaN47344-40-3TDMAGe四(二甲胺)锗
Tetrakis(dimethylamino)zirconiumC8H24N4Zr19756-04-8TDMAZ四(二甲胺)锆
Tetrakis(ethylmethylamino)zirconiumC12H32N4Zr175923-04-3TEMAZ四(甲乙胺)锆
N-methyl-N-[tris(dimethylamino)stannyl]methanamineC8H24N4Sn1066-77-9TDMASn四(二甲胺)锡
Tetrakis(dimethylamino)titaniumC8H24N4Ti3275-24-9TDMAT四(二甲胺)钛
Ethyl(methyl)azanide,titanium(4+)C12H32N4Ti308103-54-0TEMAT四(甲乙胺)钛
Tetrakis(ethylmethylamino)vanadiumC12H32N4V791114-66-4TEMAV四(甲乙胺)钒
Tantalum(5+) ethanolateC10H30O5Ta6074-84-6PETOTa乙氧基钽
Pentakis(dimethylamino)tantalum(V)C10H30N5Ta19824-59-0PDMATa五(二甲胺)钽
FerroceneC10H10Fe102-54-5FeCp2二茂铁
MagnesoceneC10H10Mg1284-72-6MgCp2二茂镁
ManganoceneC10H10Mn73138-26-8MnCp2二茂锰
NickeloceneC10H10Ni1271-28-9NiCp2二茂镍
RuthenoceneC10H10Ru1287-13-4RuCp2二茂钌
Cobaltocene(η5-C5H5)2Co1277-43-6CoCp2二茂钴
bis(methylcyclopentadienyl)magnesiumC12H14Mg40672-08-0Mg(MeCp)2二甲基二茂镁
Bis(ethylcyclopentadienyl)magnesiumC14H18Mg114460-02-5Mg(EtCp)2二乙基二茂镁
1,1'-DiethylmanganoceneC14H18Mn101923-26-6Mn(EtCp)2二乙基二茂锰
Bis(ethylcyclopentadienyl)rutheniumC7H9RuC7H932992-96-4Ru(EtCp)2二乙基二茂钌
(Trimethyl)methylcyclopentadienylplatinum(IV)C9H16Pt94442-22-5(MeCp)Pt(CH3)3三甲基甲基环戊二烯基铂
Lithium DipivaloylmethanateC11H19LiO222441-13-0Li(thd)(四甲基庚二酮)锂
(2,2,6,6-Tetramethyl-3,5-heptanedionato)silverC11H19AgO279827-25-1Ag(thd)(四甲基庚二酮)银
Copper(II) hexafluoroacetylacetonate hydrateCu(C5HF6O2)2155640-85-0  Cu(hfac)2二(六氟戊二酮)铜
Palladium(II)hexafluoro-2,4-pentanedionateC10H8F18O4Pd64916-48-9Pd(hfac)2二(六氟乙酰丙酮)钯
Iridium(III)2,4-pentanedionateC15H21IrO615635-87-7Ir(acac)3三(乙酰丙酮)铱
Neodymium-thdC33H60NdO615492-47-4Nd(thd)3三(四甲基庚二酮)钕
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III)C33H57O6Yb15492-52-1Yb(thd)3三(四甲基庚二酮)镱
Tetrakis(tetramethylheptanedionato)ceriumC22H38CeO418960-54-8Ce(thd)4四(四甲基庚二酮)铈
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)C33H57LaO614319-13-2La(thd)3三(四甲基庚二酮)镧
Tris(tetramethylcyclopentadienyl)lanthanumC27H39La148607-23-2La(MeCp)3甲基环戊二烯镧
Bis(trimethylsilyl)azanide,lanthanum(3+)C18H54LaN3Si6175923-07-6La(TMSA)3三(二(三甲硅)胺)镧
Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionateC22H38O4Pb21319-43-7Pb(thd)2二(四甲基庚二酮)铅
Bismuth III TetramethylheptanedionateC33H57BiO6142617-53-6Bi(thd)3三(四甲基庚二酮)铋
Erbium-DPMC33H57ErO634750-80-6Er(thd)3三(四甲基庚二酮)铒
Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)C33H57O6Y15632-39-0Y(thd)3三(四甲基庚二酮)钇
Bis(N,N'-di-i-propylacetamidinato)cobalt(II)(C8H17N2)2Co635680-58-9Co(iPr-MeAMD)2二(N,N’-二异丙基乙脒基)钴
Bis(N,N'-diisopropylacetamidinato) Nickel (II)(C8H17N2)2Ni635680-62-5Ni(iPr-MeAMD)2二(N,N’-二异丙基乙脒基)镍
lanthanum tris(N,N'-diisopropylacetamidinate)(C8H17N2)3La635680-72-7La(iPr-MeAMD)3三(N,N’-二异丙基乙脒基)镧
Yttrium tris(N,N'-diisopropylacetamidinate)(C8H17N2)3Y
Y(iPr-MeAMD)3三(N,N’-二异丙基乙脒基)钇
Molybdenum hexacarbonylMo(CO)613939-06-5Mo(CO)6六羰基钼
(Trimethyl)methylcyclopentadienylplatinum (IV)C9H16Pt94442-22-5Me3Pt(MeCp)三甲基甲基环戊二烯铂
Tris(methylcyclopentadienyl)yttrium(III)C18H21Y329735-72-0Y(MeCp)3甲基环戊二烯钇
Indium,(h5-2,4-cyclopentadien-1-yl)-C5H5In34822-89-4InCp环戊二烯基铟
Tin(IV) chlorideCl4Sn7646-78-8Cl4Sn四氯化锡
Titanium(IV) isopropoxideC12H28O4Ti546-68-9TIPT四异丙醇钛
Niohium pentaethnxidcNb(OC2H5)53236-82-6PETONb乙氧基铌
Lithium t-butoxideC4H9LiO1907-33-1TBOLi叔丁醇锂
Iron t-butoxideC12H27FeO3620945-29-13TBOFe叔丁醇铁
GALLIUM (III) ISOPROPOXIDEC9H21GaO34452-61-3TPGa三异丙氧基镓
Titanium tetrachlorideTiCl47550-45-0TiCl4四氯化钛
Carbon tetrachlorideCCl456-23-5CCl4四氯化碳
Carbon tetrabromideCBr4558-13-4CBr4四溴化碳
PentachloropyridineC5Cl5N2176-62-7PCP五氯吡啶
boride compoundB compound
AMY-B-330硼化合物
Germanium(Ⅳ) methoxideC4H12GeO4992-91-6
甲氧基锗





硅基化合物
英文名化学式CAS号别名中文名
Bis(t-butylamino)silane([NH(C4H9)]2SiH2)186598-40-3BTBAS双(叔丁基氨基)硅烷
Tris(dimethylamino)silaneC6H19N3Si15112-89-73DMAS三(二甲氨基)硅烷
N,N-DisilylsilanamineH9NSi313862-16-3TSA(N,N-二硅烷基-硅烷胺)
Bis(diethylamino)silaneC8H22N2Si27804-64-4BDEAS(SAM24)双(二乙胺基)硅烷
DiisopropylaminosilaneC6H17NSi908831-34-5DIPAS(LTO-520)二(异丙氨基)硅烷
Tetraethyl OrthosilicateC8H22N2Si1978/10/4TEOS原硅酸乙酯
HexachlorodisilaneSi2Cl613465-77-5HCDS六氯乙硅烷
Bis(trimethylsilyl)azanide,gadolinium(3+)C18H54GdN3Si635789-03-8Gd(TMSA)3三(二(三甲硅)胺)钆


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