Products

Current postion: Home > Products > Inorganic gases-high purity

Hexafluoroethan-C2F6

summary

Name:Hexafluoroethane Chemical common name：全氟乙烷 Formula:C2F6 Categories:Etching Class Subclasses:Etching Class Specifications:5N: Storage methods:Steel cylinders

Description

Description	Hexafluoroethane (hexafluoroethane), also known as perfluoroethane, ethane is the product of all the six hydrogen atoms substituted by fluorine atoms after, halogenated hydrocarbons (chemical formula: C2F6), is also the hydrocarbons ethane corresponding perfluorinated compounds, is a non-flammable gas, insoluble in water, slightly soluble in alcohol. Hexafluoroethane be used together along with HFC refrigerant R508A (Hexafluoroethane 61%) and R508B (Hexafluoroethane 54%).
Usage	Used as the insulating gas, plasma etchants, high dielectric strength coolant Ling.
Precautions	This product can cause rapid suffocation. After exposure cause headache, nausea, and dizziness. Dangerous for the environment, for water and atmospheric pollution, atmospheric ozone has a strong destructive power. This product is non-combustible.
By Industry	Semiconductor

1, 3 butadiene, pure hydrogen and high purity oxygen, nitrogen, argon, hydrogen, nitrogen dioxide, trimethyl bromide boron TMB, silane and silane mix other gas, hydrogen, nitrogen trifluoride selenide, boron trifluoride, liquid ammonia, etching gas, electronic gas, six fluoride oxide, hydrogen sulfide, and methane, high pure butane, high purity isobutane methane, high purity, high purity, high purity propane butane, high-purity propylene and isobutylene, butadiene, ethane, butene, anti - 2 - butene, propylene, propiolic, vinyl acetylene, ethyl acetylene, carbonyl sulfur, allene, sulfur hexafluoride, new pentane, carbon tetrafluoride, eight fluorine cyclobutane, nitric oxide, high purity nitrous oxide (n2o), hydrogen chloride, high purity helium, ultrapure, ultra pure nitrogen, pure argon and helium gas standard.Trimethyl gallium, trimethyl indium gallium, trimethyl aluminum, triethyl, triethyl indium, diethyl zinc, zinc dimethyl, dicyclopentadienyl magnesium source (MO)